1 High-Vacuum Deposition Chamber

• The chamber is constructed of stainless steel with double walls and is water-cooled, ensuring optimal growth conditions.
• The vacuum chamber is subjected to leak testing with helium at a minimum of 10⁻⁹ mbar-L/sec.
• Supports high vacuum operation with multiple ports for sample loading, viewing, and instrumentation.
• Customizable windows and access points allow in-situ observation and process flexibility.
• Constructed for durability and long-term use under high-temperature conditions.

2 System Framework

• A robust clean room-grade frame designed for holding the chamber and system components.
• Integrated rackmount mounting for electronics, power distribution, and control systems.
• Equipped with mobility and leveling features for easy installation and adjustment.

3 Chamber Pumping:

• Includes an oil mechanical pump capable of achieving high vacuum levels better than 5×10⁻³ Torr.
• Includes all relevant hardware, vacuum plumbing, and valves necessary for pumping and venting operations.
• Compact, efficient design optimized for stability and long-term use.
• If selected, a turbo pump will further pump down the chamber achieving high vacuum levels better than 1×10⁻⁶ Torr.

4 Oil Mechanical Pump

• High-performance rotary vane oil pump optimized for process stability.
• Equipped with an isolation valve to protect against back-streaming.

5 Gas Flow and Pressure Control

• Includes an enclosure that houses the system’s mass flow controllers (MFCs) and interfaces with the user’s exhaust system to mitigate any potential gas leaks.
• Blue Wave Semiconductor provides a tailored selection of MFCs for users to select from. (Please see the specification table)
• All MFCs are constructed with gas shut-off valves for overpressure and cross contamination prevention.
• Includes a closed-loop pressure controller for precise pressure regulation.
• Contained in the ventilated gas cabinet is a pressure relief valve for maximum safety.

6 Vacuum Gauge

• Includes a combination gauge integrating capacitance and Pirani measurement methods.
• If a turbo is added, a full range gauge will be provided to measure from atmospheric pressure to 10⁻⁹ Torr.
• The gauge contains a digital pressure readout.
• Includes all mounting hardware and cables.
• Easy to operate and clean, resisting metal and oxide contamination over extended use.

7 Filament Power and Replacement

• High current DC power supply capable of heating filaments to temperatures required for deposition.
• Filament holder designed for easy installation and replacement of filaments.
• Water flow interlock included.

8 Substrate Holder/Adjustment

• Rotation and distance adjustment via Z-stage improve uniformity of deposition.
• Temperature monitored and regulated for reproducible results.
• Accommodates substrates up to 8-inch.

9 System Cooling

• Water-cooled components maintain stable operation during high-temperature processes.
• Designed to enhance process stability and repeatability.
• Components that necessitate water cooling will be directed to a shared flow indicator located near the rear of the assembly.

10 Computer Control

Includes a computer equipped with custom software, which includes, but is not limited to:

• Gas flow control and monitoring
• Pressure control and monitoring
• Vacuum measurements
• DC current and voltage control and monitoring
• Temperature measurement (If selected)
• Adjustable safety interlocks
• A library for users to save custom recipes