PLD Target Carousel
The BWS Target Carousel is a fully customizable state-of-the-art system accessory designed for high-precision PLD and CVD processes. This advanced system features motorized target indexing, target rotation, and target rastering, alongside target adjustment. With six target stages, it provides exceptional flexibility, enabling seamless multi-material deposition.
The system is optimized for reproducible film deposition, with rotation of targets ensuring superior uniformity, making it ideal for high-throughput applications in advanced materials research and manufacturing. To ensure uniform film properties, the Target Carousel employs a programed motor to raster and rotate a target, ensuring even distribution.
CVD Diamond Research Capabilities
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Blue Wave Semi Pulsed Laser Deposition (PLD) System 2024
The BWS PLD System is a fully customizable state-of-the-art physical vapor deposition system designed for the synthesis of high-quality thin films of metal-oxides, nitrides, and multilayer thin film device research.
View SpecificationsSputtering Process
Sputtering is a process whereby atoms are ejected from a solid target material due to bombardment of the target by energetic ions. Sputter deposition is a physical vapor deposition (PVD) method for depositing thin films onto a substrate.
View SpecificationsHFCVD Heater Z and Rotation Stage
Blue Wave Substrate/Wafer rotation products are capable of reaching up to 700°C while rotating up to 10-20 rpm. Compatible with reactive sputtering, PLD, PVD, e-beam and thermal evaporation, PECVD, ALD, in UHV or inert and reactive gas environments.
View SpecificationsIn-Depth System Information
1.1 Target Carousel
The Target Carousel consists of six different targets and is mounted on an 8-inch CF flange. The system includes two motors: one for the rotation of the six targets and the other for target selection. It is built with a ferrofluidic dual-axis rotary feedthrough, two feedthroughs and ports, offering remarkable robustness and reliability while minimizing maintenance and maintaining high vacuum. This design ensures long-lasting performance, outlasting traditional bellows-style feedthroughs. Changing targets is quick and efficient, with minimal downtime, and the six-target configuration helps save time. The target Carousel consists of a shield for the remaining 5 targets while one of the targets is in the deposition process to remove any impurity or cross contamination from the deposition.
1.2 Target Control Interface
The interface is housed in a 1u rackmount enclosure, which contains a knob for selecting the target to be used for deposition. Another button controls the rastering of the target, ensuring an even film deposition. A switch for clockwise and counterclockwise adjustment is also located on the face of the rackmount enclosure, enabling better rotational motion of the target.
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Technical Specifications
| Specification | Parameter |
|---|---|
| Number of targets | Six |
| Dimensions | Mounted on 8in Cf Flange with a height ranging from 6 to 12 inches |
| Power | One 120VAC power source is required |
For more information, Contact Blue Wave.
