Target Carousel System — Blue Wave Semiconductors
Target Carousel

Target Carousel System

State-of-the-Art Multi-Target Deposition

The BWS Target Carousel is a fully customizable accessory designed for high-precision PLD and CVD processes. Featuring motorized target indexing, rotation, and rastering across six target stages — seamless multi-material deposition with zero vacuum break.

Ferrofluidic dual-axis feedthrough technology ensures high-vacuum integrity and longevity far beyond traditional bellows-style alternatives.

Six-target motorized carousel
Automated rotation & rastering
Ferrofluidic dual-axis feedthrough
Integrated cross-contamination shield
8” CF flange mounting
1U rackmount control interface

Custom configurations available. Price varies based on specifications.

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Optimized for Advanced Deposition

01
🎯

PLD Systems

Seamless integration with Pulsed Laser Deposition systems for multi-material thin film research without breaking vacuum.

02

Multi-Target Deposition

Six independent targets enable rapid material switching and complex multilayer heterostructure fabrication.

03
🔬

Uniform Film Deposition

Automated rotation and rastering deliver exceptional film uniformity and reproducibility across deposition runs.

04
🧪

Contamination-Free Research

Integrated shielding isolates each target, preventing cross-contamination across all six material positions.

System Specifications

Every BWS Target Carousel is precision-engineered for long-term reliability in high-vacuum deposition environments.

6
Target Positions
8”
CF Flange Size
2
Motor Axes
1U
Control Enclosure
SpecificationParameter
Number of TargetsSix (6)
Mounting Flange8” CF
Height Range6 to 12 inches
Feedthrough TypeFerrofluidic Dual-Axis Rotary
Motor ConfigurationDual Motor System
Rotation DirectionCW / CCW
Control Interface1U Rackmount Enclosure
Input Power120 VAC, Single Phase
Contamination ShieldIntegrated
Target Change MethodIn-Vacuum, No Vent Required

System Components & Features

1 Target Carousel Assembly

  • Six-target configuration mounted on an 8” CF flange
  • Two motors: one for target selection, one for rotation/rastering
  • Ferrofluidic dual-axis rotary feedthrough — two feedthroughs and ports
  • Outlasts traditional bellows-style feedthroughs with minimal maintenance
  • Quick and efficient in-vacuum target changes with no downtime
  • Integrated shield protects remaining 5 targets during deposition
  • Eliminates impurity and cross-contamination between materials

2 Control Interface

  • Housed in a 1U rackmount enclosure for clean lab integration
  • Selector knob for choosing the active deposition target
  • Dedicated button controls target rastering for uniform film deposition
  • CW/CCW adjustment switch for precise rotational motion control
  • Industrial-grade components for reliable long-term operation
  • Clear labeling and intuitive layout for ease of use

3 Key Features & Design Advantages

  • Ferrofluidic feedthrough technology — remarkable robustness and vacuum integrity
  • Maintains high vacuum throughout target switching and deposition
  • Minimized maintenance vs. traditional bellows or O-ring feedthroughs
  • Programmed motor control ensures uniform rastering and consistent film results
  • Optimized for reproducible deposition across multi-material experiments
  • Compatible with UHV deposition environments

4 Integration & Compatibility

  • Designed for seamless integration with BWS PLD systems
  • Compatible with sputtering and other vacuum deposition platforms
  • Adjustable height range of 6 to 12 inches for flexible chamber configurations
  • 120 VAC single-phase power — easy lab installation
  • Custom configurations available on request
Target Carousel — Standard Configuration

Full product brochure covering specifications, mounting options, and ordering information for the standard 6-target carousel.

Download PDF
Target Carousel — Extended Height (12”)

Brochure for the extended-height variant designed for larger deposition chambers requiring additional clearance.

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Target Carousel — Custom Integration Guide

Technical guide for integrating the carousel into third-party or custom vacuum chambers with non-standard flange configurations.

Request Document

Need a specific datasheet or configuration guide? Contact us and we’ll send it directly.

PLD System

Pulsed Laser Deposition (PLD)

The Target Carousel is the primary accessory for BWS PLD systems, enabling in-vacuum multi-target switching and uniform thin film deposition.

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DEAR MPCVD

DEAR — MPCVD

Compatible with the Blue Wave DEAR MPCVD system for multi-target CVD diamond research with controlled dopant switching.

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Hot Filament CVD

Hot Filament CVD

Can be integrated into Hot Filament CVD configurations requiring multi-material or multi-position substrate setups.

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Thermal Evaporator

Thermal Evaporator

Custom target carousel variants are available for integration with Bell Jar thermal evaporation systems requiring multi-source capability.

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Questions About the Target Carousel?

Call us: +1 (410) 907-6807 or email info@bluewavesemi.com
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Blue Wave Semiconductors ✦ Target Carousel System ✦ Advanced Multi-Target Deposition ✦ Blue Wave Semiconductors ✦ Target Carousel System ✦ Advanced Multi-Target Deposition ✦